Inventor

RENDERS MICHAEL JOHANNES HENDRIKA WILHELMINA

NL2 patents

Patents

2 patents

USRE49142EJul 19, 2022

Lithographic apparatus and an object positioning system

ASML NETHERLANDS BV0 citations59

US9939738B2Apr 10, 2018

Lithographic apparatus and an object positioning system

ASML NETHERLANDS BV0 citations48