Inventor

CHOI SEHYEONG

KR2 patents

Patents

2 patents

US11529655B2Dec 20, 2022

Nozzle, substrate processing apparatus including the same, and substrate processing method

SEMES CO LTD3 citations69

US11897005B2Feb 13, 2024

Nozzle, substrate processing apparatus including the same, and substrate processing method

SEMES CO LTD1 citations58