Inventor

SHUMATE DAVID A

US3 patents

Patents

3 patents

US5173449ADec 22, 1992

Metallization process

MOTOROLA INC43 citations86

US5114875AMay 19, 1992

Planar dielectric isolated wafer

MOTOROLA INC20 citations80

US5137610AAug 11, 1992

Sputter chamber with extended protection plate and method of use

MOTOROLA INC10 citations72