Inventor
CHEN SHU MEI
TW4 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHU MEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
2 patentsUS5938885AAug 17, 1999
Automated method for monitoring and controlling the orthophosphoric acid etch rate of silicon nitride insulator layers
TAIWAN SEMICONDUCTOR MFG20 citations91
US5830375ANov 3, 1998
Automated method for monitoring and controlling the orthophosphoric acid etch rate of silicon nitride insulator layers
TAIWAN SEMICONDUCTOR MFG23 citations91