Inventor
LU BRIAN G
US3 patents
Patents
3 patentsUS7482247B1Jan 27, 2009
Conformal nanolaminate dielectric deposition and etch bag gap fill process
NOVELLUS SYSTEMS INC583 citations98
US7265061B1Sep 4, 2007
Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties
NOVELLUS SYSTEMS INC632 citations98
US7208389B1Apr 24, 2007
Method of porogen removal from porous low-k films using UV radiation
NOVELLUS SYSTEMS INC602 citations98