Inventor

YANG JENG-HUEI

TW3 patents

⚠️ This page may combine multiple inventors who share the name “YANG JENG-HUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US11107671B2Aug 31, 2021

Method of processing semiconductor substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56

US10269557B2Apr 23, 2019

Apparatus of processing semiconductor substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46

LIU MU-CHIEH

1 patent

US8208714B2Jun 26, 2012

Formation of prescribed pattern on wafer for use in SEM defect offset

LIU MU-CHIEH0 citations33