Inventor
KUMADA SHINJI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KUMADA SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
3 patentsUS10961422B2Mar 30, 2021
Surface treatment liquid, surface treatment method, and method for suppressing pattern collapse
TOKYO OHKA KOGYO CO LTD0 citations48
US9164381B2Oct 20, 2015
Resist composition, method of forming resist pattern, and compound
TOKYO OHKA KOGYO CO LTD0 citations48
US10353291B2Jul 16, 2019
Method for forming photosensitive resin layer, method for producing photoresist pattern, and method for producing plated molded article
TOKYO OHKA KOGYO CO LTD0 citations32