Inventor
MATSUSHITA ATSUSHI
JP25 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHITA ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
12 patentsUS5435880AJul 25, 1995
Plasma processing apparatus
TOKYO OHKA KOGYO CO LTD76 citations95
US5846329ADec 8, 1998
Plasma processing apparatus
TOKYO OHKA KOGYO CO LTD72 citations94
US6509279B2Jan 21, 2003
Methods for processing a coating film and for manufacturing a semiconductor element
TOKYO OHKA KOGYO CO LTD15 citations92
US5364488ANov 15, 1994
Coaxial plasma processing apparatus
TOKYO OHKA KOGYO CO LTD47 citations92
US6836073B2Dec 28, 2004
Simultaneous discharge apparatus
TOKYO OHKA KOGYO CO LTD18 citations84
US6664199B2Dec 16, 2003
Coating liquid for forming a silica group coating film having a small dielectric constant
TOKYO OHKA KOGYO CO LTD6 citations74
US6649534B2Nov 18, 2003
Methods for processing a coating film and for manufacturing a semiconductor element
TOKYO OHKA KOGYO CO LTD5 citations74
US6067930AMay 30, 2000
Coaxial plasma processing apparatus
TOKYO OHKA KOGYO CO LTD13 citations73
US6995096B2Feb 7, 2006
Method for forming multi-layer wiring structure
TOKYO OHKA KOGYO CO LTD1 citations61
US9023172B2May 5, 2015
Method of manufacturing laminate
TOKYO OHKA KOGYO CO LTD2 citations57
US6723633B2Apr 20, 2004
Method for forming multi-layer wiring structure
TOKYO OHKA KOGYO CO LTD0 citations51
US6758222B2Jul 6, 2004
Processing method for substrate
TOKYO OHKA KOGYO CO LTD0 citations38