Inventor

IMAI MOTOKATSU

JP11 patents

⚠️ This page may combine multiple inventors who share the name “IMAI MOTOKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

6 patents

US5252825AOct 12, 1993

Absolute encoder using interpolation to obtain high resolution

NIKON CORP44 citations90

US5663557ASep 2, 1997

Multiple rotating absolute encoder capable of accurately latching absolute address data with data on number of rotations

NIKON CORP8 citations71

US9019467B2Apr 28, 2015

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIKON CORP2 citations62

US7932996B2Apr 26, 2011

Exposure apparatus, exposure method, and device fabrication method

NIKON CORP2 citations62

US9268237B2Feb 23, 2016

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIKON CORP0 citations52

US8384880B2Feb 26, 2013

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIKON CORP0 citations52

IMAI MOTOKATSU

2 patents

US8797506B2Aug 5, 2014

Exposure apparatus, exposure method, and device fabrication method

IMAI MOTOKATSU0 citations46

US8272544B2Sep 25, 2012

Exposure apparatus, exposure method, and device fabrication method

IMAI MOTOKATSU0 citations46

KAWASAKI HEAVY IND LTD

1 patent

US6107621AAug 22, 2000

Modular encoder and method of manufacturing the same

KAWASAKI HEAVY IND LTD10 citations72

NIPPON KOGAKU KK

1 patent

US9846371B2Dec 19, 2017

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

NIPPON KOGAKU KK0 citations52

OWA SOICHI

1 patent

US8208117B2Jun 26, 2012

Exposure method, substrate stage, exposure apparatus, and device manufacturing method

OWA SOICHI0 citations51