Inventor
BECKMANN GUSTAV
DE2 patents
Patents
2 patentsUS6528384B2Mar 4, 2003
Method for manufacturing a trench capacitor
INFINEON TECHNOLOGIES AG20 citations89
US6583464B1Jun 24, 2003
Memory cell using amorphous material to stabilize the boundary face between polycrystalline semiconductor material of a capacitor and monocrystalline semiconductor material of a transistor
INFINEON TECHNOLOGIES AG10 citations71