Inventor

OTTENWAELDER DIETMAR

DE3 patents

Patents

3 patents

US6528384B2Mar 4, 2003

Method for manufacturing a trench capacitor

INFINEON TECHNOLOGIES AG20 citations89

US6645839B2Nov 11, 2003

Method for improving a doping profile for gas phase doping

INFINEON TECHNOLOGIES AG3 citations59

US6528433B2Mar 4, 2003

Method for monitoring nitrogen processes

INFINEON TECHNOLOGIES AG4 citations59