Inventor

HAN YOUNG-KI

KR5 patents

⚠️ This page may combine multiple inventors who share the name “HAN YOUNG-KI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE KYUNG HO

1 patent

US8888950B2Nov 18, 2014

Apparatus for plasma processing and method for plasma processing

LEE KYUNG HO15 citations77

CHARM ENGINEERING CO LTD

1 patent

US8373086B2Feb 12, 2013

Plasma processing apparatus and method for plasma processing

CHARM ENGINEERING CO LTD16 citations75

JUSUNG ENG CO LTD

1 patent

US6734100B2May 11, 2004

Method of forming ruthenium thin film using plasma enhanced process

JUSUNG ENG CO LTD12 citations72

LEE JIN-HO

1 patent

US8105647B2Jan 31, 2012

Method of forming oxide film and oxide deposition apparatus

LEE JIN-HO4 citations57

HAN YOUNG KI

1 patent

US8864936B2Oct 21, 2014

Apparatus and method for processing substrate

HAN YOUNG KI1 citations43