Inventor

ZHANG KEVIN W

US2 patents

⚠️ This page may combine multiple inventors who share the name “ZHANG KEVIN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US9516729B2Dec 6, 2016

Variable radius mirror dichroic beam splitter module for extreme ultraviolet source

ASML NETHERLANDS BV3 citations68

AKINS ROBERT P

1 patent

US8295316B2Oct 23, 2012

Method and system for managing light source operation

AKINS ROBERT P5 citations53