Inventor
LIN TSUN-CHING
TW5 patents
⚠️ This page may combine multiple inventors who share the name “LIN TSUN-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6019849AFeb 1, 2000
Method and apparatus for automatic purge of HMDS vapor piping
TAIWAN SEMICONDUCTOR MFG11 citations69
US5763006AJun 9, 1998
Method and apparatus for automatic purge of HMDS vapor piping
TAIWAN SEMICONDUCTOR MFG5 citations58
US5908041AJun 1, 1999
Method for cleaning a photoresist developer spray stream nozzle
TAIWAN SEMICONDUCTOR MFG4 citations56
US6020692AFeb 1, 2000
Marco lamp life extension in installation for ADI, AEI
TAIWAN SEMICONDUCTOR MFG3 citations51