Inventor
MIKUMO AKIRA
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MIKUMO AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO ELECTRIC INDUSTRIES
14 patentsUS7554059B2Jun 30, 2009
Heater unit and semiconductor manufacturing apparatus including the same
SUMITOMO ELECTRIC INDUSTRIES10 citations84
US5507924AApr 16, 1996
Method and apparatus for adjusting sectional area ratio of metal-covered electric wire
SUMITOMO ELECTRIC INDUSTRIES14 citations80
US11127605B2Sep 21, 2021
Wafer holder
SUMITOMO ELECTRIC INDUSTRIES2 citations72
US5602488AFeb 11, 1997
Method and apparatus for adjusting sectional area ratio of metal-covered electric wire
SUMITOMO ELECTRIC INDUSTRIES6 citations72
US6493925B1Dec 17, 2002
Manufacturing method of superconducting wire
SUMITOMO ELECTRIC INDUSTRIES7 citations71
US12046488B2Jul 23, 2024
Semiconductor manufacturing apparatus and wafer holding table for semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES0 citations62
US5779864AJul 14, 1998
Apparatus for adjusting sectional area ratio of metal-covered electric wire
SUMITOMO ELECTRIC INDUSTRIES3 citations61
US12033880B2Jul 9, 2024
Wafer holding body
SUMITOMO ELECTRIC INDUSTRIES0 citations60
US10886157B2Jan 5, 2021
Wafer holding unit
SUMITOMO ELECTRIC INDUSTRIES1 citations60
US11195701B2Dec 7, 2021
Showerhead
SUMITOMO ELECTRIC INDUSTRIES0 citations59
US11239057B2Feb 1, 2022
Showerhead and method for manufacturing the same
SUMITOMO ELECTRIC INDUSTRIES0 citations51
US12063721B2Aug 13, 2024
Heater
SUMITOMO ELECTRIC INDUSTRIES0 citations49
US11732359B2Aug 22, 2023
Wafer holder
SUMITOMO ELECTRIC INDUSTRIES0 citations49
US6777376B1Aug 17, 2004
Superconducting wire
SUMITOMO ELECTRIC INDUSTRIES0 citations47