Inventor
KATSUOKA SEIJI
JP46 patents
⚠️ This page may combine multiple inventors who share the name “KATSUOKA SEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
39 patentsUS6844274B2Jan 18, 2005
Substrate holder, plating apparatus, and plating method
EBARA CORP39 citations96
US6435949B1Aug 20, 2002
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof
EBARA CORP71 citations96
US6332826B1Dec 25, 2001
Polishing apparatus
EBARA CORP34 citations96
US5860847AJan 19, 1999
Polishing apparatus
EBARA CORP63 citations96
US5839947ANov 24, 1998
Polishing apparatus
EBARA CORP58 citations96
US5643067AJul 1, 1997
Dressing apparatus and method
EBARA CORP87 citations96
US6629883B2Oct 7, 2003
Polishing apparatus
EBARA CORP68 citations94
US5647792AJul 15, 1997
Polishing apparatus
EBARA CORP23 citations93
US7101255B2Sep 5, 2006
Polishing apparatus
EBARA CORP15 citations92
US7087117B2Aug 8, 2006
Substrate processing apparatus and substrate processing method
EBARA CORP23 citations92
US6918814B2Jul 19, 2005
Polishing apparatus
EBARA CORP15 citations92
US6413146B1Jul 2, 2002
Polishing apparatus
EBARA CORP17 citations92
US6354918B1Mar 12, 2002
Apparatus and method for polishing workpiece
EBARA CORP53 citations92
US6312312B1Nov 6, 2001
Polishing apparatus
EBARA CORP27 citations92
US5931723AAug 3, 1999
Polishing apparatus
EBARA CORP21 citations92
US6293858B1Sep 25, 2001
Polishing device
EBARA CORP21 citations91
US10486285B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US9358662B2Jun 7, 2016
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US7575636B2Aug 18, 2009
Substrate processing apparatus and substrate processing method
EBARA CORP8 citations84
US7442257B2Oct 28, 2008
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations84
US7368016B2May 6, 2008
Substrate processing unit and substrate processing apparatus
EBARA CORP15 citations84
US11583973B2Feb 21, 2023
Polishing apparatus
EBARA CORP4 citations75
US6402597B1Jun 11, 2002
Polishing apparatus and method
EBARA CORP12 citations74
US6139677AOct 31, 2000
Polishing apparatus
EBARA CORP13 citations74
US11426834B2Aug 30, 2022
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP1 citations73
US10688620B2Jun 23, 2020
Polishing apparatus
EBARA CORP2 citations73
US7807027B2Oct 5, 2010
Substrate holder, plating apparatus, and plating method
EBARA CORP6 citations73
US7585205B2Sep 8, 2009
Substrate polishing apparatus and method
EBARA CORP7 citations73
US9144881B2Sep 29, 2015
Polishing apparatus and polishing method
EBARA CORP5 citations72
US7235135B2Jun 26, 2007
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations71
US7886685B2Feb 15, 2011
Substrate holding apparatus, substrate holding method, and substrate processing apparatus
EBARA CORP2 citations62
US7341634B2Mar 11, 2008
Apparatus for and method of processing substrate
EBARA CORP4 citations62
US7374646B2May 20, 2008
Electrolytic processing apparatus and substrate processing method
EBARA CORP2 citations61
US9687957B2Jun 27, 2017
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP0 citations52
US7976362B2Jul 12, 2011
Substrate polishing apparatus and method
EBARA CORP1 citations52
US7735450B2Jun 15, 2010
Substrate holding apparatus
EBARA CORP0 citations52
US6413357B1Jul 2, 2002
Polishing apparatus
EBARA CORP0 citations52
US7959977B2Jun 14, 2011
Substrate processing method and apparatus
EBARA CORP0 citations51
US7735451B2Jun 15, 2010
Substrate processing method and apparatus
EBARA CORP0 citations51