Inventor
NISHI TOYOMI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “NISHI TOYOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
18 patentsUS5679059AOct 21, 1997
Polishing aparatus and method
EBARA CORP110 citations98
US6050884AApr 18, 2000
Polishing apparatus
EBARA CORP57 citations96
US5860847AJan 19, 1999
Polishing apparatus
EBARA CORP63 citations96
US5839947ANov 24, 1998
Polishing apparatus
EBARA CORP58 citations96
US5885134AMar 23, 1999
Polishing apparatus
EBARA CORP81 citations95
US5704827AJan 6, 1998
Polishing apparatus including cloth cartridge connected to turntable
EBARA CORP67 citations95
US6500051B1Dec 31, 2002
Polishing apparatus and method
EBARA CORP25 citations92
US5931723AAug 3, 1999
Polishing apparatus
EBARA CORP21 citations92
US5679064AOct 21, 1997
Polishing apparatus including detachable cloth cartridge
EBARA CORP33 citations92
US6074276AJun 13, 2000
Polishing apparatus
EBARA CORP22 citations91
US6905400B2Jun 14, 2005
Method and apparatus for dressing polishing cloth
EBARA CORP13 citations84
US6409582B1Jun 25, 2002
Polishing apparatus
EBARA CORP14 citations84
US6364752B1Apr 2, 2002
Method and apparatus for dressing polishing cloth
EBARA CORP14 citations84
US6139677AOct 31, 2000
Polishing apparatus
EBARA CORP13 citations74
US5645473AJul 8, 1997
Polishing apparatus
EBARA CORP7 citations74
USRE38215EAug 12, 2003
Polishing apparatus
EBARA CORP4 citations61
US6413357B1Jul 2, 2002
Polishing apparatus
EBARA CORP0 citations52
US7708618B2May 4, 2010
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
EBARA CORP0 citations50