Inventor
FERRI JR EDWARD T
US15 patents
⚠️ This page may combine multiple inventors who share the name “FERRI JR EDWARD T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED CHEMICAL SOLUTIONS
7 patentsUS5417346AMay 23, 1995
Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
APPLIED CHEMICAL SOLUTIONS82 citations95
US5330072AJul 19, 1994
Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
APPLIED CHEMICAL SOLUTIONS90 citations95
US5490611AFeb 13, 1996
Process for precise volumetrio diluting/mixing of chemicals
APPLIED CHEMICAL SOLUTIONS60 citations94
US5370269ADec 6, 1994
Process and apparatus for precise volumetric diluting/mixing of chemicals
APPLIED CHEMICAL SOLUTIONS49 citations94
US5874049AFeb 23, 1999
Two-stage chemical mixing system
APPLIED CHEMICAL SOLUTIONS40 citations91
US5803599ASep 8, 1998
Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures
APPLIED CHEMICAL SOLUTIONS49 citations91
US5632960AMay 27, 1997
Two-stage chemical mixing system
APPLIED CHEMICAL SOLUTIONS34 citations91
LAM RES CORP
3 patentsUS6336845B1Jan 8, 2002
Method and apparatus for polishing semiconductor wafers
LAM RES CORP45 citations94
US6517418B2Feb 11, 2003
Method of transporting a semiconductor wafer in a wafer polishing system
LAM RES CORP18 citations92
US6416385B2Jul 9, 2002
Method and apparatus for polishing semiconductor wafers
LAM RES CORP16 citations91