Inventor
SHENG HAN-MING
TW6 patents
Patents
6 patentsUS6309944B1Oct 30, 2001
Overlay matching method which eliminates alignment induced errors and optimizes lens matching
TAIWAN SEMICONDUCTOR MFG23 citations85
US6477265B1Nov 5, 2002
System to position defect location on production wafers
TAIWAN SEMICONDUCTOR MFG19 citations81
US6734116B2May 11, 2004
Damascene method employing multi-layer etch stop layer
TAIWAN SEMICONDUCTOR MFG19 citations80
US6252670B1Jun 26, 2001
Method for accurately calibrating a constant-angle reflection-interference spectrometer (CARIS) for measuring photoresist thickness
TAIWAN SEMICONDUCTOR MFG18 citations79
US6330355B1Dec 11, 2001
Frame layout to monitor overlay performance of chip composed of multi-exposure images
TAIWAN SEMICONDUCTOR MFG10 citations68
US6344365B1Feb 5, 2002
Arc coating on mask quartz plate to avoid alignment error on stepper or scanner
TAIWAN SEMICONDUCTOR MFG0 citations46