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Inventor
PATERSON ALLAN
US
2 patents
⚠️ This page may combine multiple inventors who share the name “PATERSON ALLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
1 patent
US6592437B1
Jul 15, 2003
Active gimbal ring with internal gel and methods for making same
LAM RES CORP
18 citations
80
STRASBAUGH A CALIFORNIA CORP
1 patent
US6921719B2
Jul 26, 2005
Method of preparing whole semiconductor wafer for analysis
STRASBAUGH A CALIFORNIA CORP
19 citations
79