Inventor
ZUCKER MARTIN L
US11 patents
⚠️ This page may combine multiple inventors who share the name “ZUCKER MARTIN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
7 patentsUS6835278B2Dec 28, 2004
Systems and methods for remote plasma clean
MATTSON TECH INC62 citations94
US7972444B2Jul 5, 2011
Workpiece support with fluid zones for temperature control
MATTSON TECH INC20 citations90
US11508560B2Nov 22, 2022
Focus ring adjustment assembly of a system for processing workpieces under vacuum
MATTSON TECH INC2 citations69
US11348767B2May 31, 2022
Plasma processing apparatus having a focus ring adjustment assembly
MATTSON TECH INC4 citations69
US11251026B2Feb 15, 2022
Material deposition prevention on a workpiece in a process chamber
MATTSON TECH INC4 citations64
US11515127B2Nov 29, 2022
End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum
MATTSON TECH INC0 citations58
US11195704B2Dec 7, 2021
Pedestal assembly for plasma processing apparatus
MATTSON TECH INC1 citations56