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Inventor
CHIBA KAZUAKI
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “CHIBA KAZUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
3 patents
US7767366B2
Aug 3, 2010
Photomask blank and photomask
SHINETSU CHEMICAL CO
34 citations
92
US8012654B2
Sep 6, 2011
Photomask blank and photomask
SHINETSU CHEMICAL CO
11 citations
83
US8003284B2
Aug 23, 2011
Photomask blank and photomask
SHINETSU CHEMICAL CO
9 citations
83
TOPPAN PRINTING CO LTD
2 patents
US7767367B2
Aug 3, 2010
Photomask blank and photomask making method
TOPPAN PRINTING CO LTD
10 citations
83
US7989124B2
Aug 2, 2011
Photomask blank and photomask making method
TOPPAN PRINTING CO LTD
6 citations
73
TOKYO ELECTRON LTD
1 patent
US9388495B2
Jul 12, 2016
Method of forming mask structure
TOKYO ELECTRON LTD
1 citations
51