Inventor

GOVIL PRADEEP K

US20 patents

⚠️ This page may combine multiple inventors who share the name “GOVIL PRADEEP K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GOVIL PRADEEP K

ASML HOLDING NV

DUV scanner linewidth control by mask error factor compensation

Spatial light modulator using an integrated circuit actuator

Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use

Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

System and method utilizing an electrooptic modulator

System and method utilizing an electrooptic modulator

Spatial light modulator using an integrated circuit actuator and method of making and using same

System and method utilizing an illumination beam adjusting system

ASML NETHERLANDS BV

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Pellicle and pellicle assembly

SVG LITHOGRAPHY SYSTEMS INC

Method for adjusting an illumination field based on selected reticle feature

Dynamically adjustable high resolution adjustable slit

Method of controlling illumination field to reduce line width variation

(unassigned)

DUV scanner linewidth control by mask error factor compensation

GOVIL PRADEEP K

Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

WIENER ROBERTO B

Cooling of actuator coils

TSACOYEANES JAMES G

Method utilizing an electrooptic modulator