Inventor

HAYASHI KUNITO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HAYASHI KUNITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CRESTEC CORP

1 patent

US6989536B2Jan 24, 2006

Electron-beam writing device and electron-beam writing method

CRESTEC CORP1 citations41

MIYATA HIROYUKI

1 patent

US8158310B2Apr 17, 2012

Aberration evaluation pattern, aberration evaluation method, aberration correction method, electron beam drawing apparatus, electron microscope, master, stamper, recording medium, and structure

MIYATA HIROYUKI0 citations36