Inventor
PARSON THOMAS
US3 patents
Patents
3 patentsUS10988718B2Apr 27, 2021
Tungsten post-CMP cleaning composition
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US11164738B2Nov 2, 2021
Compositions and methods for removing ceria particles from a surface
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US10340150B2Jul 2, 2019
Ni:NiGe:Ge selective etch formulations and method of using same
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