Inventor
GILHOOLY JAMES ALBERT
US10 patents
Patents
10 patentsUS6126848AOct 3, 2000
Indirect endpoint detection by chemical reaction and chemiluminescence
IBM485 citations97
US5704987AJan 6, 1998
Process for removing residue from a semiconductor wafer after chemical-mechanical polishing
IBM104 citations93
US6228280B1May 8, 2001
Endpoint detection by chemical reaction and reagent
IBM51 citations92
US6228769B1May 8, 2001
Endpoint detection by chemical reaction and photoionization
IBM8 citations73
US6180422B1Jan 30, 2001
Endpoint detection by chemical reaction
IBM5 citations73
US6066564AMay 23, 2000
Indirect endpoint detection by chemical reaction
IBM12 citations73
US6440263B1Aug 27, 2002
Indirect endpoint detection by chemical reaction and chemiluminescence
IBM8 citations72
US6419785B1Jul 16, 2002
Endpoint detection by chemical reaction
IBM2 citations62
US6194230B1Feb 27, 2001
Endpoint detection by chemical reaction and light scattering
IBM5 citations62
US6251784B1Jun 26, 2001
Real-time control of chemical-mechanical polishing processing by monitoring ionization current
IBM3 citations61