Inventor
MORGAN III CLIFFORD OWEN
US9 patents
Patents
9 patentsUS6126848AOct 3, 2000
Indirect endpoint detection by chemical reaction and chemiluminescence
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US6228280B1May 8, 2001
Endpoint detection by chemical reaction and reagent
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US5658185AAug 19, 1997
Chemical-mechanical polishing apparatus with slurry removal system and method
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US6228769B1May 8, 2001
Endpoint detection by chemical reaction and photoionization
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US6180422B1Jan 30, 2001
Endpoint detection by chemical reaction
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US6066564AMay 23, 2000
Indirect endpoint detection by chemical reaction
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US6440263B1Aug 27, 2002
Indirect endpoint detection by chemical reaction and chemiluminescence
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US6419785B1Jul 16, 2002
Endpoint detection by chemical reaction
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US6194230B1Feb 27, 2001
Endpoint detection by chemical reaction and light scattering
IBM5 citations62