Inventor
ZINNER DOMINIK
AT8 patents
Patents
8 patentsUS10943807B2Mar 9, 2021
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH7 citations82
US10692747B2Jun 23, 2020
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH6 citations82
US11315901B2Apr 26, 2022
Method for bonding substrates
EV GROUP E THALLNER GMBH3 citations71
US10991609B2Apr 27, 2021
Method and substrate holder for the controlled bonding of substrates
EV GROUP E THALLNER GMBH2 citations71
US12025426B2Jul 2, 2024
Measuring device and method for determining the course of a bonding wave
EV GROUP E THALLNER GMBH2 citations63
US12412865B2Sep 9, 2025
Apparatus and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations61
US11488851B2Nov 1, 2022
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH0 citations60
US12199062B2Jan 14, 2025
Device and method for the alignment of substrates
EV GROUP E THALLNER GMBH0 citations56