Inventor
CHUANG SHENG-CHAO
TW3 patents
Patents
3 patentsUS11679469B2Jun 20, 2023
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12172263B2Dec 24, 2024
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11189727B2Nov 30, 2021
FinFET contacts and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59