Inventor

CHOI BYUNG-JIN

US239 patents

⚠️ This page may combine multiple inventors who share the name “CHOI BYUNG-JIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHOI BYUNG-JIN

MOLECULAR IMPRINTS INC

Alignment systems for imprint lithography

Step and repeat imprint lithography systems

Partial vacuum environment imprinting

Formation of discontinuous films during an imprint lithography process

Formation of discontinuous films during an imprint lithography process

Method for expelling gas positioned between a substrate and a mold

Systems for magnification and distortion correction for imprint lithography processes

System to control an atmosphere between a body and a substrate

System for varying dimensions of a substrate during nanoscale manufacturing

Apparatus to vary dimensions of a substrate during nano-scale manufacturing

Imprinting of partial fields at the edge of the wafer

Capillary imprinting technique

Patterning substrates employing multiple chucks

Method and system for double-sided patterning of substrates

Capillary imprinting technique

System for dispensing liquids

System and method for dispensing liquids

Bifurcated contact printing technique

Alignment system and method for a substrate in a nano-imprint process

Technique for separating a mold from solidified imprinting material

Chucking system for nano-manufacturing

Method to control an atmosphere between a body and a substrate

Method for expelling gas positioned between a substrate and a mold

Method of retaining a substrate to a wafer chuck

Method of separating a mold from a solidified layer disposed on a substrate

Chucking system comprising an array of fluid chambers

Method of varying dimensions of a substrate during nano-scale manufacturing

Magnification correction employing out-of-plane distortion of a substrate

Imprint lithography substrate processing tool for modulating shapes of substrates

Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks

Interferometric analysis method for the manufacture of nano-scale devices

Interferometric analysis for the manufacture of nano-scale devices

Method and system to measure characteristics of a film disposed on a substrate

Nano imprinting with reusable polymer template with metallic or oxide coating

UNIV TEXAS

Apparatus to control displacement of a body spaced-apart from a surface

High precision orientation alignment and gap control stages for imprint lithography processes

Imprint lithography template having a feature size under 250 nm

Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks

Method of determining alignment of a template and a substrate having a liquid disposed therebetween

Method of orientating a template with respect to a substrate in response to a force exerted on the template

Apparatus to orientate a body with respect to a surface

Method of separating a template from a substrate during imprint lithography

Method to control the relative position between a body and a surface

DONGWOO FINE CHEM CO LTD

Touch sensor including antenna

Touch panel and image display device including the same

UNIV TEXAS SYSTEMS

Method to reduce adhesion between a conformable region and a pattern of a mold

KHUSNATDINOV NIYAZ

Strain and kinetics control during separation phase of imprint process

GANAPATHISUBRAMANIAN MAHADEVAN

Imprint lithography system and method

SREENIVASAN SIDLGATA V

Methods for exposure for the purpose of thermal management for imprint lithography processes

CHOI BYUNG-JIN

Method and system to control movement of a body for nano-scale manufacturing