Inventor
KHAMANKAR RAJESH
US38 patents
⚠️ This page may combine multiple inventors who share the name “KHAMANKAR RAJESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
34 patentsUS6930007B2Aug 16, 2005
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance
TEXAS INSTRUMENTS INC190 citations98
US6730566B2May 4, 2004
Method for non-thermally nitrided gate formation for high voltage devices
TEXAS INSTRUMENTS INC74 citations98
US6548366B2Apr 15, 2003
Method of two-step annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile
TEXAS INSTRUMENTS INC56 citations96
US6503846B1Jan 7, 2003
Temperature spike for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates
TEXAS INSTRUMENTS INC64 citations96
US6153490ANov 28, 2000
Method for forming integrated circuit capacitor and memory
TEXAS INSTRUMENTS INC75 citations96
US6610614B2Aug 26, 2003
Method for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates
TEXAS INSTRUMENTS INC67 citations95
US7226834B2Jun 5, 2007
PMD liner nitride films and fabrication methods for improved NMOS performance
TEXAS INSTRUMENTS INC21 citations92
US7012028B2Mar 14, 2006
Transistor fabrication methods using reduced width sidewall spacers
TEXAS INSTRUMENTS INC26 citations92
US6632747B2Oct 14, 2003
Method of ammonia annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile
TEXAS INSTRUMENTS INC51 citations92
US6600183B1Jul 29, 2003
Integrated circuit capacitor and memory
TEXAS INSTRUMENTS INC46 citations92
US6555431B1Apr 29, 2003
Method for forming integrated circuit capacitor and memory
TEXAS INSTRUMENTS INC36 citations92
US8021990B2Sep 20, 2011
Gate structure and method
TEXAS INSTRUMENTS INC11 citations84
US7535066B2May 19, 2009
Gate structure and method
TEXAS INSTRUMENTS INC9 citations84
US7217626B2May 15, 2007
Transistor fabrication methods using dual sidewall spacers
TEXAS INSTRUMENTS INC18 citations84
US7129127B2Oct 31, 2006
Integration scheme to improve NMOS with poly cap while mitigating PMOS degradation
TEXAS INSTRUMENTS INC16 citations84
US6780719B2Aug 24, 2004
Method for annealing ultra-thin, high quality gate oxide layers using oxidizer/hydrogen mixtures
TEXAS INSTRUMENTS INC13 citations84
US6342420B1Jan 29, 2002
Hexagonally symmetric integrated circuit cell
TEXAS INSTRUMENTS INC13 citations74
US7560792B2Jul 14, 2009
Reliable high voltage gate dielectric layers using a dual nitridation process
TEXAS INSTRUMENTS INC5 citations73
US7227201B2Jun 5, 2007
CMOS device having different amounts of nitrogen in the NMOS gate dielectric layers and PMOS gate dielectric layers
TEXAS INSTRUMENTS INC6 citations73
US7183165B2Feb 27, 2007
Reliable high voltage gate dielectric layers using a dual nitridation process
TEXAS INSTRUMENTS INC5 citations73
US7049242B2May 23, 2006
Post high voltage gate dielectric pattern plasma surface treatment
TEXAS INSTRUMENTS INC6 citations73
US7018925B2Mar 28, 2006
Post high voltage gate oxide pattern high-vacuum outgas surface treatment
TEXAS INSTRUMENTS INC6 citations73
US7670892B2Mar 2, 2010
Nitrogen based implants for defect reduction in strained silicon
TEXAS INSTRUMENTS INC3 citations63
US7553718B2Jun 30, 2009
Methods, systems and structures for forming semiconductor structures incorporating high-temperature processing steps
TEXAS INSTRUMENTS INC2 citations63
US7345001B2Mar 18, 2008
Gate dielectric having a flat nitrogen profile and method of manufacture therefor
TEXAS INSTRUMENTS INC2 citations63
US7192894B2Mar 20, 2007
High performance CMOS transistors using PMD liner stress
TEXAS INSTRUMENTS INC5 citations63
US6166408ADec 26, 2000
Hexagonally symmetric integrated circuit cell
TEXAS INSTRUMENTS INC3 citations63
US7847401B2Dec 7, 2010
Methods, systems and structures for forming semiconductor structures incorporating high-temperature processing steps
TEXAS INSTRUMENTS INC3 citations62
US7601575B2Oct 13, 2009
Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance
TEXAS INSTRUMENTS INC2 citations62
US7514308B2Apr 7, 2009
CMOS device having different amounts of nitrogen in the NMOS gate dielectric layers and PMOS gate dielectric layers
TEXAS INSTRUMENTS INC2 citations62
US7339240B2Mar 4, 2008
Dual-gate integrated circuit semiconductor device
TEXAS INSTRUMENTS INC2 citations62
US7682988B2Mar 23, 2010
Thermal treatment of nitrided oxide to improve negative bias thermal instability
TEXAS INSTRUMENTS INC2 citations59
US7402524B2Jul 22, 2008
Post high voltage gate oxide pattern high-vacuum outgas surface treatment
TEXAS INSTRUMENTS INC0 citations51
US6869862B2Mar 22, 2005
Method for improving a physical property defect value of a gate dielectric
TEXAS INSTRUMENTS INC0 citations42
BU HAOWEN
3 patentsUS8114784B2Feb 14, 2012
Laminated stress overlayer using In-situ multiple plasma treatments for transistor improvement
BU HAOWEN2 citations60
US8809141B2Aug 19, 2014
High performance CMOS transistors using PMD liner stress
BU HAOWEN0 citations50
US8084787B2Dec 27, 2011
PMD liner nitride films and fabrication methods for improved NMOS performance
BU HAOWEN0 citations50