Inventor

PALMER SHANE R

US18 patents

⚠️ This page may combine multiple inventors who share the name “PALMER SHANE R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PALMER SHANE R

TEXAS INSTRUMENTS INC

Method of exposing a light sensitive material

System and method for semiconductor processing using polarized radiant energy

Photolithographic technique and illuminator using real-time addressable phase shift light shift

Optical proximity correction

Integrated circuit layout and verification method

Mask or wafer writing technique

Hexagonally symmetric integrated circuit cell

Hexagonally symmetric integrated circuit cell

Method and apparatus for etching surface with excited gas

Automated circuit design dimension change responsive to low contrast condition determination in photomask phase pattern

NIKON CORP

Microelectromechanical mirror assembly

Dynamic patterning method that removes phase conflicts and improves pattern fidelity and CDU on a two phase-pixelated digital scanner

Increasing and controlling sensitivity of non-linear metallic thin-film resists

Array description system for large patterns

Forced grid method for correcting mask patterns for a pattern transfer apparatus

NIPPON KOGAKU KK

Microelectromechanical mirror assembly

NIKON RES CORPORATION OF AMERICA

Increasing and controlling sensitivity of non-linear metallic thin-film resists

WILLIAMSON DAVID M

Exposure apparatus that utilizes multiple masks