Inventor
WATIA JENNIFER L
US4 patents
Patents
4 patentsUS6812471B2Nov 2, 2004
Method of surface texturizing
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Method of surface texturizing
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US7993470B2Aug 9, 2011
Fabricating and cleaning chamber components having textured surfaces
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US7097744B2Aug 29, 2006
Method and apparatus for controlling darkspace gap in a chamber
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