Inventor

GRANADOS AXEL A

US3 patents

⚠️ This page may combine multiple inventors who share the name “GRANADOS AXEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US8003412B2Aug 23, 2011

Method and apparatus for measurement and control of photomask to substrate alignment

IBM1 citations60

US7989968B2Aug 2, 2011

Method and apparatus for measurement and control of photomask to substrate alignment

IBM2 citations60

GRANADOS AXEL A

1 patent

US8138089B2Mar 20, 2012

Method and apparatus for measurement and control of photomask to substrate alignment

GRANADOS AXEL A0 citations43