Inventor
WALDHAUER ANN P
US4 patents
Patents
4 patentsUS5924058AJul 13, 1999
Permanently mounted reference sample for a substrate measurement tool
APPLIED MATERIALS INC27 citations92
US6366861B1Apr 2, 2002
Method of determining a wafer characteristic using a film thickness monitor
APPLIED MATERIALS INC49 citations91
US6277194B1Aug 21, 2001
Method for in-situ cleaning of surfaces in a substrate processing chamber
APPLIED MATERIALS INC66 citations91
US7704327B2Apr 27, 2010
High temperature anneal with improved substrate support
APPLIED MATERIALS INC18 citations80