Inventor
NAGAI MIKIO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “NAGAI MIKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOOTH JEAN-PAUL
2 patentsUS9153421B2Oct 6, 2015
Passive capacitively-coupled electrostatic (CCE) probe method for detecting plasma instabilities in a plasma processing chamber
BOOTH JEAN-PAUL5 citations82
US8179152B2May 15, 2012
Passive capacitively-coupled electrostatic (CCE) probe arrangement for detecting plasma instabilities in a plasma processing chamber
BOOTH JEAN-PAUL8 citations82