Inventor

SADAKUNI SHUN

JP2 patents

Patents

2 patents

US8912095B2Dec 16, 2014

Polishing method, polishing apparatus and polishing tool

SANO YASUHISA7 citations80

US9233449B2Jan 12, 2016

Polishing method, polishing apparatus and GaN wafer

SANO YASUHISA4 citations68