Inventor
OLIVAS JAMES M
US4 patents
Patents
4 patentsUS6615510B2Sep 9, 2003
Wafer drying apparatus and method
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US6446355B1Sep 10, 2002
Disk drying apparatus and method
LAM RES CORP16 citations90
US6430841B1Aug 13, 2002
Apparatus for drying batches of wafers
LAM RES CORP15 citations90
US6477786B1Nov 12, 2002
Apparatus for drying batches of disks
LAM RES CORP9 citations71