P

Inventor

SAWAHATA TETSUYA

JP8 patents
⚠️ This page may combine multiple inventors who share the name “SAWAHATA TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

4 patents
US6555816B1Apr 29, 2003

Scanning electron microscope and sample observation method using the same

HITACHI LTD35 citations92
US6501077B1Dec 31, 2002

Scanning electron microscope

HITACHI LTD31 citations92
US6740877B2May 25, 2004

Scanning electron microscope and sample observation method using the same

HITACHI LTD10 citations73
US6855931B2Feb 15, 2005

Scanning electron microscope and sample observation method using the same

HITACHI LTD0 citations51

HITACHI HIGH TECH CORP

2 patents
US7705302B2Apr 27, 2010

Scanning electron microscope

HITACHI HIGH TECH CORP13 citations81
US11894211B2Feb 6, 2024

Electron beam apparatus and method for controlling electron beam apparatus

HITACHI HIGH TECH CORP0 citations58

MORISHITA HIDEO

1 patent
US8629395B2Jan 14, 2014

Charged particle beam apparatus

MORISHITA HIDEO10 citations81

HATANO MICHIO

1 patent
US9202667B2Dec 1, 2015

Charged particle radiation device with bandpass detection

HATANO MICHIO2 citations60