Inventor
CHIEN WEN-SHENG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHIEN WEN-SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
4 patentsUS5985092ANov 16, 1999
Endpoint detection system
UNITED MICROELECTRONICS CORP17 citations78
US6545245B2Apr 8, 2003
Method for dry cleaning metal etching chamber
UNITED MICROELECTRONICS CORP3 citations57
US7978303B2Jul 12, 2011
Method for removing micro-bubbles and/or particles from liquid, liquid supply apparatus and immersion exposure apparatus
UNITED MICROELECTRONICS CORP0 citations51
US7335600B2Feb 26, 2008
Method for removing photoresist
UNITED MICROELECTRONICS CORP0 citations48
TAIWAN SEMICONDUCTOR MFG
2 patentsUS7117058B2Oct 3, 2006
Automatic statistical process control (SPC) chart generation apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG55 citations87
US7254513B2Aug 7, 2007
Fault detection and classification (FDC) specification management apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG11 citations80
YANG CHIN-SHENG
2 patentsUS8263013B2Sep 11, 2012
Method for removing micro-bubbles and/or particles from liquid, liquid supply apparatus and immersion exposure apparatus
YANG CHIN-SHENG0 citations51
US8262915B2Sep 11, 2012
Method for removing micro-bubbles and/or particles from liquid, liquid supply apparatus and immersion exposure apparatus
YANG CHIN-SHENG0 citations51