Inventor
LINGEL STEFAN
DE2 patents
Patents
2 patentsUS6929536B2Aug 16, 2005
System for chemical mechanical polishing comprising an improved pad conditioner
ADVANCED MICRO DEVICES INC7 citations68
US6936480B2Aug 30, 2005
Method of controlling the chemical mechanical polishing of stacked layers having a surface topology
ADVANCED MICRO DEVICES INC2 citations57