Inventor

LUO LAIZHONG

US2 patents

Patents

2 patents

US6335293B1Jan 1, 2002

Systems and methods for two-sided etch of a semiconductor substrate

MATTSON TECH INC384 citations95

US6624082B2Sep 23, 2003

Systems and methods for two-sided etch of a semiconductor substrate

MATTSON TECH INC23 citations89