Inventor
MITSUKI TORU
JP49 patents
Patents
49 patentsUS6107639AAug 22, 2000
Semiconductor device with rod like crystals and a recessed insulation layer
SEMICONDUCTOR ENERGY LAB99 citations99
US6087679AJul 11, 2000
Semiconductor thin film and semiconductor device
SEMICONDUCTOR ENERGY LAB254 citations99
US7052943B2May 30, 2006
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB65 citations98
US6828587B2Dec 7, 2004
Semiconductor device
SEMICONDUCTOR ENERGY LAB80 citations98
US6787807B2Sep 7, 2004
Semiconductor device
SEMICONDUCTOR ENERGY LAB85 citations98
US6326249B1Dec 4, 2001
Semiconductor device and process for producing same
SEMICONDUCTOR ENERGY LAB86 citations98
US6294815B1Sep 25, 2001
Semiconductor device
SEMICONDUCTOR ENERGY LAB89 citations98
US6506636B2Jan 14, 2003
Method of manufacturing a semiconductor device having a crystallized amorphous silicon film
SEMICONDUCTOR ENERGY LAB135 citations97
US6830994B2Dec 14, 2004
Method of manufacturing a semiconductor device having a crystallized semiconductor film
SEMICONDUCTOR ENERGY LAB70 citations96
US6822262B2Nov 23, 2004
Semiconductor thin film and semiconductor device
SEMICONDUCTOR ENERGY LAB33 citations96
US6703265B2Mar 9, 2004
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB53 citations96
US6690068B2Feb 10, 2004
Thin film transistors and semiconductor device
SEMICONDUCTOR ENERGY LAB48 citations96
US6495886B1Dec 17, 2002
Semiconductor thin film and semiconductor device
SEMICONDUCTOR ENERGY LAB51 citations96
US6337235B1Jan 8, 2002
Semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB56 citations96
US7503975B2Mar 17, 2009
Semiconductor device and fabrication method therefor
SEMICONDUCTOR ENERGY LAB20 citations93
US7368335B2May 6, 2008
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB13 citations93
US7316947B2Jan 8, 2008
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB23 citations93
US7306982B2Dec 11, 2007
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB19 citations93
US7297978B2Nov 20, 2007
Semiconductor thin film and semiconductor device
SEMICONDUCTOR ENERGY LAB16 citations93
US7160784B2Jan 9, 2007
Method of manufacturing a semiconductor film with little warp
SEMICONDUCTOR ENERGY LAB19 citations93
US6979632B1Dec 27, 2005
Fabrication method for thin-film semiconductor
SEMICONDUCTOR ENERGY LAB27 citations93
US6956235B2Oct 18, 2005
Semiconductor device
SEMICONDUCTOR ENERGY LAB19 citations93
US6828179B2Dec 7, 2004
Semiconductor device and method for manufacturing same
SEMICONDUCTOR ENERGY LAB41 citations93
US6812081B2Nov 2, 2004
Method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB24 citations93
US6808968B2Oct 26, 2004
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB37 citations93
US6770518B2Aug 3, 2004
Method for manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB19 citations93
US6720575B2Apr 13, 2004
Semiconductor device with a semiconductor layer over a surface having a recess pitch no smaller than 0.3 microns
SEMICONDUCTOR ENERGY LAB14 citations93
US6693299B1Feb 17, 2004
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB30 citations93
US6515299B1Feb 4, 2003
Semiconductor device with rod like crystals and a recessed insulation layer
SEMICONDUCTOR ENERGY LAB20 citations93
US6388270B1May 14, 2002
Semiconductor device and process for producing same
SEMICONDUCTOR ENERGY LAB46 citations93
US8384084B2Feb 26, 2013
Semiconductor thin film and semiconductor device
SEMICONDUCTOR ENERGY LAB6 citations84
US7928438B2Apr 19, 2011
Semiconductor thin film and semiconductor device
SEMICONDUCTOR ENERGY LAB7 citations84
US7202119B2Apr 10, 2007
Method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB10 citations84
US7196400B2Mar 27, 2007
Semiconductor device with enhanced orientation ratio and method of manufacturing same
SEMICONDUCTOR ENERGY LAB11 citations84
US7122450B2Oct 17, 2006
Process for manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB11 citations84
US7022590B2Apr 4, 2006
Method for forming a semiconductor device using crystals of crystal growth
SEMICONDUCTOR ENERGY LAB10 citations82
US7573110B1Aug 11, 2009
Method of fabricating semiconductor devices
SEMICONDUCTOR ENERGY LAB5 citations74
US7326604B2Feb 5, 2008
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB6 citations74
US7307007B2Dec 11, 2007
Semiconductor device
SEMICONDUCTOR ENERGY LAB8 citations74
US7034337B2Apr 25, 2006
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB4 citations74
US6872638B2Mar 29, 2005
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB9 citations74
US6635929B2Oct 21, 2003
Uniform thin film semiconductor device
SEMICONDUCTOR ENERGY LAB9 citations74
US5966596AOct 12, 1999
Method of fabricating semiconductor devices by crystallizing amorphous silicon with nickel
SEMICONDUCTOR ENERGY LAB14 citations74
US7618904B2Nov 17, 2009
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations63
US7485553B2Feb 3, 2009
Process for manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations63
US7459354B2Dec 2, 2008
Method for manufacturing a semiconductor device including top gate thin film transistor and method for manufacturing an active matrix device including top gate thin film transistor
SEMICONDUCTOR ENERGY LAB3 citations63
US7169689B2Jan 30, 2007
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations61
US7307282B2Dec 11, 2007
Thin film transistors and semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations52
US7538011B2May 26, 2009
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations50