Inventor

FUKUI RYOTA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “FUKUI RYOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC CORP

2 patents

US4894546AJan 16, 1990

Hollow cathode ion sources

ULVAC CORP24 citations87

US4841197AJun 20, 1989

Double-chamber ion source

ULVAC CORP29 citations87

ULVAC INC

1 patent

US7847271B2Dec 7, 2010

Ion implanting apparatus

ULVAC INC0 citations46