Inventor

LOHOKARE SHRIKANT

US2 patents

⚠️ This page may combine multiple inventors who share the name “LOHOKARE SHRIKANT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US7380982B2Jun 3, 2008

Accurate temperature measurement for semiconductor applications

LAM RES CORP11 citations73

YUN SEOKMIN

1 patent

US8277675B2Oct 2, 2012

Method of damaged low-k dielectric film layer removal

YUN SEOKMIN0 citations36