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Inventor
GARCIA JOHN ANTHONY
US
2 patents
Patents
2 patents
US12454036B2
Oct 28, 2025
Substrate handling systems and methods for CMP processing
APPLIED MATERIALS INC
0 citations
40
US12036635B2
Jul 16, 2024
Methods of detecting non-conforming substrate processing events during chemical mechanical polishing
APPLIED MATERIALS INC
0 citations
37