Inventor

BALAKUMAR MANOJ

IN2 patents

Patents

2 patents

US12454036B2Oct 28, 2025

Substrate handling systems and methods for CMP processing

APPLIED MATERIALS INC0 citations40

US12036635B2Jul 16, 2024

Methods of detecting non-conforming substrate processing events during chemical mechanical polishing

APPLIED MATERIALS INC0 citations37