Inventor

KIM SEONG-SUE

KR43 patents

⚠️ This page may combine multiple inventors who share the name “KIM SEONG-SUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM SEONG-SUE

SAMSUNG ELECTRONICS CO LTD

Method of and apparatus for recording data on optical recording medium

Apparatus and method for measuring aerial image of EUV mask

Method of and apparatus for recording data on optical recording medium

Method of and apparatus for recording data on optical recording medium

Lithography apparatus

Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit device

EUV mask blank, photomask manufactured by using the EUV mask blank, lithography apparatus using the photomask and method of fabricating semiconductor device using the photomask

Reflective photomask and method of fabricating the same

Method and apparatus for recording data on optical recording medium

Method and apparatus for recording data on optical recording medium

Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor.

Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor

Method of and apparatus for recording data on optical recording medium

Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor

Method of and apparatus for recording data on an optical recording medium

Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor

Method and apparatus for recording data on optical recording medium

Method of and apparatus for recording data on optical recording medium

Method of and apparatus for recording data on optical recording medium

Phase change optical disc

EUV mask blank, photomask manufactured by using the EUV mask blank, lithography apparatus using the photomask and method of fabricating semiconductor device using the photomask

Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit device

Reflective extreme ultraviolet mask and method of forming a pattern using the same

Method of and apparatus for recording data on optical recording medium

Method and apparatus for recording data on optical recording medium

Recording apparatus for and method of improving overwrite characteristics

Signal detection method of a phase-change optical disk

Apparatus and method for generating extreme ultra violet radiation

Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor

Apparatus and method for recording mark

LEE DONG-GUN

Method of measuring aerial image of EUV mask

Apparatus for measuring aerial image of EUV mask

Method of measuring phase of phase shift mask

Beam generator

EUV projection lens and optic system having the same

Reflective extreme ultraviolet mask

Reflective photomask and method of fabricating, reflective illumination system and method of process using the same

System for monitoring haze of a photomask

KIM TAE-GEUN

Reflective extreme ultraviolet mask and method of manufacturing the same

Method of manufacturing reflective extreme ultraviolet mask

KIM SEONG-SUE

Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same

KIM SANG-HYUN

Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit

AHN YONG-JIN

Method of and apparatus for recording data on optical recording medium