Inventor
SARIGIANNIS DEMETRIUS
US26 patents
⚠️ This page may combine multiple inventors who share the name “SARIGIANNIS DEMETRIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
24 patentsUS6890596B2May 10, 2005
Deposition methods
MICRON TECHNOLOGY INC418 citations99
US6844260B2Jan 18, 2005
Insitu post atomic layer deposition destruction of active species
MICRON TECHNOLOGY INC104 citations98
US6753271B2Jun 22, 2004
Atomic layer deposition methods
MICRON TECHNOLOGY INC40 citations96
US7056806B2Jun 6, 2006
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
MICRON TECHNOLOGY INC23 citations92
US6835664B1Dec 28, 2004
Methods of forming trenched isolation regions
MICRON TECHNOLOGY INC18 citations92
US7544388B2Jun 9, 2009
Methods of depositing materials over substrates, and methods of forming layers over substrates
MICRON TECHNOLOGY INC4 citations74
US7303991B2Dec 4, 2007
Atomic layer deposition methods
MICRON TECHNOLOGY INC4 citations74
US7279398B2Oct 9, 2007
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
MICRON TECHNOLOGY INC6 citations74
US7119034B2Oct 10, 2006
Atomic layer deposition method of forming an oxide comprising layer on a substrate
MICRON TECHNOLOGY INC5 citations74
US7067438B2Jun 27, 2006
Atomic layer deposition method of forming an oxide comprising layer on a substrate
MICRON TECHNOLOGY INC5 citations74
US7794787B2Sep 14, 2010
Methods of depositing materials over substrates, and methods of forming layers over substrates
MICRON TECHNOLOGY INC1 citations63
US7498057B2Mar 3, 2009
Deposition methods
MICRON TECHNOLOGY INC4 citations63
US7378354B2May 27, 2008
Atomic layer deposition methods
MICRON TECHNOLOGY INC3 citations63
US7368382B2May 6, 2008
Atomic layer deposition methods
MICRON TECHNOLOGY INC1 citations63
US7368381B2May 6, 2008
Methods of forming materials
MICRON TECHNOLOGY INC3 citations63
US7329615B2Feb 12, 2008
Atomic layer deposition method of forming an oxide comprising layer on a substrate
MICRON TECHNOLOGY INC3 citations63
US7282239B2Oct 16, 2007
Systems and methods for depositing material onto microfeature workpieces in reaction chambers
MICRON TECHNOLOGY INC6 citations63
US7247561B2Jul 24, 2007
Method of removing residual contaminants from an environment
MICRON TECHNOLOGY INC3 citations63
US7087525B2Aug 8, 2006
Methods of forming layers over substrates
MICRON TECHNOLOGY INC2 citations63
US7048968B2May 23, 2006
Methods of depositing materials over substrates, and methods of forming layers over substrates
MICRON TECHNOLOGY INC2 citations63
US6896730B2May 24, 2005
Atomic layer deposition apparatus and methods
MICRON TECHNOLOGY INC5 citations63
US7947597B2May 24, 2011
Methods of titanium deposition
MICRON TECHNOLOGY INC0 citations52
US7700480B2Apr 20, 2010
Methods of titanium deposition
MICRON TECHNOLOGY INC0 citations52
US7611971B2Nov 3, 2009
Method of removing residual contaminants from an environment
MICRON TECHNOLOGY INC0 citations52