Inventor

SANDHU GURTEJ S

US1,118 patents

⚠️ This page may combine multiple inventors who share the name “SANDHU GURTEJ S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SANDHU GURTEJ S

MICRON TECHNOLOGY INC

Methods of fabricating a cross point memory array

Methods of forming pluralities of capacitors

Method for forming sublithographic features during the manufacture of a semiconductor device and a resulting in-process apparatus

Engagement probe having a grouping of projecting apexes for engaging a conductive pad

Removal of carbon from an insulative layer using ozone

Deposition methods

Method of forming capacitor constructions

Conductors in semiconductor devices

Methods of treating dielectric materials with oxygen, and methods of forming capacitor constructions

Method for forming platinum-rhodium stack as an oxygen barrier

Rhodium-rich oxygen barriers

Quasi-remote plasma processing method and apparatus

Deposition methods

Capacitor fabrication methods and capacitor constructions

Method of fabricating a memory device

Method for forming conductors in semiconductor devices

System for real-time control of semiconductor wafer polishing

Chemical vapor deposition using organometallic precursors

Method of forming trench isolation regions

Multiple step methods for forming conformal layers

Dielectric cure for reducing oxygen vacancies

System for real-time control of semiconductor wafer polishing

Multiple step methods for forming conformal layers

Rough electrode (high surface area) from Ti and TiN

Method of forming capacitors, method of processing dielectric layers, method of forming a DRAM cell

Method of forming a polysilicon diode and devices incorporating such diode

Method of forming a capacitor plate and a capacitor incorporating same

Plasmaless dry contact cleaning method using interhalogen compounds

System for real-time control of semiconductor wafer polishing

System for real-time control of semiconductor wafer polishing including heater

Method for optimal crystallization to obtain high electrical performance from chalcogenides

Method of forming a Ta2 O5 dielectric layer, method of forming a capacitor having a Ta2 O5 dielectric layer, and capacitor construction

System for real-time control of semiconductor wafer polishing including heater

Integrated capacitor bottom electrode for use with conformal dielectric

Apparatus and method to increase gas residence time in a reactor

System for real-time control of semiconductor wafer polishing including optical montoring

System for real-time control of semiconductor wafer polishing

Method of forming a Ta2 O5 dielectric layer with amorphous diffusion barrier layer and method of forming a capacitor having a Ta2 O5 dielectric layer and amorphous diffusion barrier layer

System for real-time control of semiconductor wafer polishing including optical monitoring

Method for forming a capacitor with electrically interconnected construction

System for real-time control of semiconductor wafer polishing including heater

Method to deposit highly conformal CVD films

Polishing pad counter meter and method for real-time control of the polishing rate in chemical-mechanical polishing of semiconductor wafers

Testing apparatus for engaging electrically conductive test pads on a semiconductor substrate having integrated circuitry for operability testing thereof

Method for forming capacitor compatible with high dielectric constant materials having a low contact resistance layer

System and method for real-time control of semiconductor a wafer polishing, and a polishing head

Spacers used to form isolation trenches with improved corners

MICRON SEMICONDUCTOR INC

Capacitor compatible with high dielectric constant materials having two independent insulative layers and the method for forming same

Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same

Method and appartus for subliming precursors